METHOD FOR FABRICATING ELECTRODE OF SURFACE ACOUSTIC WAVE FILTER

摘要

PURPOSE: An electrode fabricating method of a surface acoustic wave(SAW) filter is provided to prevent a quality deterioration owing to a power loss and a noise generation at a long-term use by improving a close adherence degree between an electrode and substrate and a thermal resistance. CONSTITUTION: In an electrode fabricating method of an SAW filter, a piezoelectric substrate(1) is rinsed by a rinsing solution of 40°C during 30 minutes, and a poly silicon(4) is deposited so as to have a thickness of 2000 angstrom while maintaining a substrate temperature at 625°C. A Ti thin film(5) of 1000 angstrom is formed on the poly silicon(4) by a DC magnetron sputtering while maintaining the substrate temperature at 50-100°C. A rapid thermal processing is performed during 15-16 seconds at 800-900°C in a nitrogen atmosphere in order to form a stable titanium silicide thin film(2). An aluminum(3) of 1000-2000 angstrom is deposited on the titanium silicide thin film(2) by a DC magnetron sputtering.