| 摘要 |
<p>PURPOSE: To facilitate positioning of a wafer stage and maintenance of fitting thereof by conducting the positioning by notches provided in the flange part of a gas introducing part and leading it out of manufacturing equipment of a semiconductor and by a positioning part provided in an extension from the wafer stage. CONSTITUTION: Notches 5 for fitting a wafer stage 2 are provided in the rear part of a gas introducing part 3 and leading it out in equipment wherein the wafer stage 2 whereon a wafer is set is inserted into a reaction tube 1 and the wafer is treated by introducing the gas into the reaction tube 1 from the part 3 and by heating it by a heater 7, and positioning is conducted by the notches 5 and a positioning part 6 provided in an extension from the wafer stage 2. After the wafer stage 2 is inserted into the quartz reaction tube 1, in other words, the positioning part 6 provided in the extension from the wafer stage 2 is fitted closely to the notches 5 provided in the flange part of the part 3 for introducing the gas and leading it out. Thereby the positioning of the wafer stage 2 can be facilitated.</p> |
