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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPH11233503(A)
申请公布日期
1999.08.27
申请号
JP19980030055
申请日期
1998.02.12
申请人
KOKUSAI ELECTRIC CO LTD
发明人
YANAGAWA HIDEHIRO
分类号
H01L21/22;H01L21/027;H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/22
代理机构
代理人
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