PROCESS-STOP CONTROLLING SYSTEM OF SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A process-stop control system of a semiconductor manufacturing apparatus is provided to prevent abnormal process such as abrupt process-stop caused by a careless mistake of a worker during a semiconductor manufacturing process by improving equipment circuit. CONSTITUTION: The process-stop control system comprises a process performing part having a plurality of cassettes(40); a control part for controlling the process performing part, a first switch(10) for performing a switch operation for stopping a downstream process and making an upstream process be standing by ready to be performed; and a second switch(20) for controlling the first switch by conducting a switching operation according to movement of the cassettes(40), the second switch(20) being coupled to the first switch.