FABRICATION OF METALLIC MICROSTRUCTURES VIA EXPOSURE OF PHOTOSENSITIVE COMPOSITION
摘要
A method of forming microstructures. An article (110) including a metal atom precursor (120) is disproportionally exposed to electromagnetic radiation in an amount and intensity sufficient to convert some of the precursor to elemental metal (160). Additional conductive material may then be deposited onto the elemental metal to produce a microstructure.
申请公布号
WO0151276(A3)
申请公布日期
2002.01.03
申请号
WO2001US00366
申请日期
2001.01.05
申请人
PRESIDENT AND FELLOWS OF HARVARD COLLEGE
发明人
DENG, TAO;ARIAS, FRANCISCO;ISMAGILOV, RUSTEM, F.;KENIS, PAUL, J., A.;WHITESIDES, GEORGE, M.