EXTRACTION METHOD OF DEFECT DENSITY AND SIZE DISTRIBUTIONS
摘要
A characterization vehicle includes a substrate having at least one layer (300), and a plurality of pairs of nested serpentine lines on a single surface of a single layer of the substrate (301a...301h, 302a...302h), each pair of nested serpentine lines having a shared pad between them (312a...312h).
申请公布号
WO02073661(A3)
申请公布日期
2002.11.14
申请号
WO2002US07409
申请日期
2002.03.12
申请人
PDF SOLUTIONS, INC.;HESS, CHRISTOPHER;STASHOWER, DAVID;STINE, BRIAN, E.;WEILAND, LARG, H.;BURCH, RICHARD;CIPLICKAS, DENIS, J.
发明人
HESS, CHRISTOPHER;STASHOWER, DAVID;STINE, BRIAN, E.;WEILAND, LARG, H.;BURCH, RICHARD;CIPLICKAS, DENIS, J.
