METHODS FOR PLANARIZATION OF METAL-CONTAINING SURFACES USING HALOGENS AND HALIDE SALTS,申请号EP20020799255-传众专利搜索

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发明名称	METHODS FOR PLANARIZATION OF METAL-CONTAINING SURFACES USING HALOGENS AND HALIDE SALTS
摘要
申请公布号	EP1458829(A1)	申请公布日期	2004.09.22
申请号	EP20020799255	申请日期	2002.12.17
申请人	MICRON TECHNOLOGY, INC.	发明人	VAARTSTRA, BRIAN, A.
分类号	B24B37/00;C09G1/02;C09K3/14;C23F3/00;H01L21/302;H01L21/304;H01L21/311;H01L21/321;H01L21/4763;(IPC1-7):C09G1/02	主分类号	B24B37/00
代理机构		代理人
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