发明名称 DEVICE OF IRRADIATING ULTRAVIOLET, METHOD OF SETTING ULTRAVIOLET IRRADIATION CONDITIONS AND METHOD OF IRRADIATING ULTRAVIOLET
摘要 <p><P>PROBLEM TO BE SOLVED: To individually set ultraviolet conditions irradiated by multiple head sections. <P>SOLUTION: A device of irradiating an ultraviolet comprises: a plurality of head sections 120 equipped with one or more semiconductor devices capable of irradiating the ultraviolet as an ultraviolet source; and a controller section 110. The controller section 110 is provided with: a memory 116 for respectively storing a plurality of ultraviolet irradiation conditions set by a setting section 140; a setting mode for setting the ultraviolet conditions; and a controller 114 which can switch an irradiation mode irradiating the ultraviolet by a console panel 144 and calls the ultraviolet irradiation conditions stored in the memory 116 at the time of the irradiation mode and controls the semiconductor devices of the head sections 120 in accordance with the ultraviolet irradiation conditions setting. The irradiation mode further includes a batch irradiation mode irradiating the ultraviolet from all the head sections 120 and an individual irradiation mode irradiating the ultraviolet from specific head sections 120. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005210054(A) 申请公布日期 2005.08.04
申请号 JP20040207897 申请日期 2004.07.14
申请人 KEYENCE CORP 发明人 SUZUKI HIDEYUKI
分类号 G21K5/00;A61C13/15;A61L2/10;A61N5/06;G03F7/20;H01L21/00;H01L21/56;H01L33/00;(IPC1-7):H01L33/00 主分类号 G21K5/00
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