| 摘要 |
A drawing apparatus for drawing a complex pattern at high speed. The apparatus is contrived by making use of the fact that if the drawing distance is relatively short, the irradiation current from the probe to the substrate can be kept constant only by applying a constant voltage without any feedback control. The value of the voltage at which a desired irradiation current is made to flow by feedback is measured and stored in advance, and the drawing is actually effected without any feedback only by turning on/off the voltage value stored. |
