METHOD FOR MANUFACTURING METAL STRUCTURE AND CARBON NANO TUBE BY USING IMMERSION PLATING

摘要

A metal structure and a method for manufacturing a carbon nano tube using a replacement plating method are provided to form a metal structure of a nano size, to etch a three dimension metal structure with a uniform thickness and to control crystallization characteristic, by performing a selective etching process after performing the replacement plating process. A first metal layer(130) is formed on a substrate(110). A second metal layer(150) is formed on a predetermined location of the first metal layer by performing a replacement plating process to a part of the first metal layer using a second metal. One of the first metal layer or the second metal layer is etched selectively.