| 摘要 |
A denting inspection apparatus is provided to extend the tracking range of auto focusing, and to examine effectively even when the flatness of a substrate is not uniform due to drooping according to enlargement of the substrate. A denting inspection apparatus includes a stage(20), at least one camera(10), an optical system transfer unit, at least one displacement sensor(30), and a control unit. The substrate of an object to inspect denting in the region of the tap mounted on one side is received in the stage. The camera photographs the denting inspection region of the substrate. The optical system transfer unit transfers the camera relative to the stage, being coupled with the camera. The displacement sensor is installed in front of the camera in the moving direction of the camera to measure the displacement of the substrate. The control unit controls the movement of the camera by pre-obtaining the flatness information of the denting inspection region of the substrate from the displacement sensor before reaching the region.
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