| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment device for producing a transparent electrically conductive film having excellent electrical conductivity and productivity, and to provide a transparent electrically conductive film formed using the treatment device. SOLUTION: In the treatment device with a treatment chamber where a longlength filmlike support is continuously carried into a space between counter electrodes, and is exposed to plasma, so as to form a transparent electrically conductive film, a first spare chamber whose atmospheric pressure is set to the one lower than the atmospheric pressure in the treatment chamber is provided adjacently to the inlet side through which the longlength filmlike support passes. The longlength filmlike support is introduced into the treatment chamber through the first spare chamber, and is discharged from the treatment chamber after the formation of the transparent electrically conductive film in the treatment chamber. Each passage port through which the longlength filmlike support passes is provided at the inlet side through which the longlength filmlike support passes in the first spare chamber, at a space between the first spare chamber and the treatment chamber, and at the outlet side through which the longlength filmlike support passes in the treatment chamber, respectively, and each passage port through which the longlength filmlike support passes is formed by nip rolls. COPYRIGHT: (C)2008,JPO&INPIT
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