| 摘要 |
PROBLEM TO BE SOLVED: To provide an easily-manufacturable probe for four-terminal measurement having excellent durability, capable of performing easily measuring operation, and realizing excellent electric contact with an inspection object. SOLUTION: This probe 1 for four-terminal measurement has characteristics wherein two root parts 11 of two probes 2, 3 mounted on an operation arm of an electric measuring device through an elastic deformation part and constituting two terminals on one side of the probe 1 for four-terminal measurement are connected through plate springs 9a, 9b having a deformation direction on the same plane as a deformation direction of the elastic deformation part, and the two tips 2a, 3a thereof are brought close in the gradually narrowed state toward each tip, and one tip 2a on the furthermore separated side from a deformation fulcrum 8c of the elastic deformation part between the two tips is furthermore projected than the other one tip 3a. COPYRIGHT: (C)2008,JPO&INPIT
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