发明名称 |
INDUCTIVE COUPLING COIL AND INDUCTIVE COUPLING PLASMA APPARATUS THEREOF |
摘要 |
<p>An inductive coupling coil comprises a plenty of separate portions with the same structure. A plenty of separate portions are coaxial and are distributed symmetrically about an axes. An inductive coupling plasma apparatus which applies an inductive coupling coil comprises a reactive chamber, an dielectric window set on the reactive chamber, in which the inductive coupling coil is set on the dielectric window and is connected to an RF source via an RF adapter.</p> |
申请公布号 |
WO2008031320(A1) |
申请公布日期 |
2008.03.20 |
申请号 |
WO2007CN02450 |
申请日期 |
2007.08.14 |
申请人 |
BEIJING NMC CO., LTD.;SONG, QIAOLI;NAN, JIANHUI |
发明人 |
SONG, QIAOLI;NAN, JIANHUI |
分类号 |
H01F38/14;H01F5/00;H01F21/00;H01L21/3065;H05H1/46 |
主分类号 |
H01F38/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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