PHASE SHIFT MASK AND METHOD OF MANUFACTURING PHASE SHIFT MASK,申请号KR20040107919-传众专利搜索

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发明名称	PHASE SHIFT MASK AND METHOD OF MANUFACTURING PHASE SHIFT MASK
摘要
申请公布号	KR100825175(B1)	申请公布日期	2008.04.24
申请号	KR20040107919	申请日期	2004.12.17
申请人		发明人
分类号	H01L21/027;G03F1/30;G03F1/58;G03F1/68;G03F7/20;G03F9/00;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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