| 摘要 |
PURPOSE:To reduce the generation of defects such as a flaw and a pit in a single side grinding method, by which a single side of a board such as a quartz glass board is ground, by using a pressure plate provided with a cushion material in its inside and to provide the single side grinding method by which the number of polishing for eliminating these defects is reduced. CONSTITUTION:In a board single side grinding method, in which a single side of a board 12 held inside a carrier 13 arranged on a surface plate 11 is ground by using a pressure plate 14 inside which a cushion material 15 is arranged, a hydrophilic substance is applied on the surface of the cushion material 15. |
