ABRASIVE PARTICLES, METHOD OF MAKING ABRASIVE PARTICLES, AND ABRASIVE ARTICLES

摘要

A method of making abrasive particles includes exposing ceramic particles to an organosilane-derived plasma formed from components comprising an organosilane and oxygen to form plasma-modified ceramic particles; and contacting a coupling agent with the second plasma-treated ceramic particle to provide the abrasive particle. Abrasive particles preparable by the method and abrasive particles containing them are also disclosed.