| 摘要 |
FIELD: technological processes.SUBSTANCE: invention relates to material science, particularly to methods of sputtering of heat shielding coating, and can be used in aircraft building and other fields of industry in production of parts of turbine engines and plants. Procedure for application of heat shielding coating on part working surface of nickel-based alloy includes application of plasma sputtering onto a prepared part surface coating of zirconium oxide stabilized by yttrium, wherein coating is created in it gradient transition layer by means of two magnetrons, wherein by means of first of magnetron is sputtered a first target from nickel-based alloy, which corresponds to composition of alloy parts, and by second magnetron is sputtered a second target made of zirconium with additives of stabilising element yttrium, wherein sputtering of first target is carried out in an argon atmosphere so that intensity of atomic stream formed from first target, exceed intensity of atomic stream formed from second target, wherein after formation of solid metal layer oxygen is fed into working chamber of sputtered coating zirconium oxide sputtering oxygen partial pressure is smoothly increased to 1.5·10Pa, and power of first magnetron is decreased to its complete disconnection, sputtering is continued until formation of zirconium oxide stabilised by yttrium, required thickness to produce nanostructured coating containing metal phase with composition corresponding to composition of alloy protected surface part, and phase of zirconium oxide stabilised by yttrium, with increasing of part surface fraction phase of zirconium oxide.EFFECT: use of disclosed method is aimed at formation of smooth transition from metallic material to oxide without interphase boundaries of macroscopic size, which enables to form a coating on working surfaces, having sufficiently high adhesion and cohesion.1 cl |
