EXPOSURE DEVICE

摘要

[Problem] To provide an exposure device capable of performing exposure processing with good precision without requiring complicated steps in the case in which the exposure processing is performed on a strip-shaped workpiece. [Solution] This exposure device comprises a workpiece conveyance means 20 for conveying a strip-shaped workpiece 1, an exposure light source 30 for generating exposure light, a photomask 40 having transmissive windows 42a-42c positioned at positions opposing ends 1a and 1b in the width direction of the workpiece 1, imaging means 60a-60c for imaging the transmissive windows 42a-42c, and position adjustment means 51 and 52 for adjusting the positional relationship between the workpiece 1 and the photomask 40. The exposure device is configured so as to be capable of adjusting the positional relationship between the workpiece 1 and the photomask 40 in such a way that the positional relationship between the workpiece 1 and the photomask 40 becomes a target positional relationship, on the basis of the relationship between the positions of the transmissive windows 42a-42c obtained by imaging with the imaging means 60a-60c and the positions of the ends 1a and 1b of the workpiece 1 recognized through the transmissive windows 42a-42c.