INFORMATION PROCESSING DEVICE, FABRICATION DEVICE, ESTIMATION METHOD, PROGRAM, AND FABRICATION METHOD

摘要

A physical quantity is efficiently estimated during repetitive execution of an etching process simulation with parameter modifications. An information processing device is provided with a basic shape storage unit and a physical quantity estimation unit. In the information processing device, the basic shape storage unit stores, as a basic shape, the shape of a sample etched in a chamber. In the information processing device, on the basis of the basic shape and a sample processing condition related to a physical quantity in the chamber, the physical quantity estimation unit estimates the physical quantity.