| 摘要 |
PURPOSE:To prevent the peeling of a first electrode film around a dividing trench and the adhering of residual tailings of the eliminated first electrode film, by forming the dividing trench by irradiating the first electrode film formed on an insulating member with an energy beam. CONSTITUTION:Belt type first insulating members 2ab, 2bc are arranged on the resin surface of a substrate 1, and belt type conducting members 3b, 3c are arranged on the right sides of the first insulating members, so as to be adjacent and in parallel with them. A first electrode film 4 is formed on almost the whole part of the resin surface of the substrate 1. The first insulating members 2ab, 2bc are irradiated with a first energy beam 5 such as a laser beam and an electron beam, from the exposed direction of a first electrode film 4, and the irradiated first electrode film 4 is eliminate to form dividing trenches 6ab, 6bc which reach the first insulating members 2ab, 2bc and electrically divide the first electrode film. Thereby the first electrode film 4 is divided into first electrode films 4a, 4b, 4c corresponding with power generation regions 7a, 7b, 7c. |
