PRODUCTION OF ROLL-TYPE STAMPER FOR 2P

摘要

PURPOSE:To produce a roll-type stamper for 2P which is easy to transmit ultraviolet rays and excellent in transferring properties of a group for track in a simple stage at low cost by winding a paper-shaped glass-stamper on the outer circumferential wall of a cylindrical base material made of ultraviolet transmitting glass via an adhesive and providing shape memory alloy thereon. CONSTITUTION:A resist pattern 4 is formed by applying a photoresist to a transparent base plate 3 made of polished extremely thin quartz glass and exposing it while utilizing a mask having a prescribed pattern and developing it. Thereafter a paper-shaped glass-stamper 1 having the prescribed pattern is formed on the transparent base plate 3 by etching the resist pattern. This glass-stamper 1 is wound on the outer circumferential wall of a cylindrical base material 2 made of ultraviolet transmittable glass via an adhesive 5. A heat resistant plastic film 16 is pinched to the outside and shape memory alloy 15 is provided thereon and thereafter heated to shrink the shape memory alloy 15. Then this is heated at curing temp. of the adhesive 5 and when the adhesive 5 is solidified, the shape memory alloy 5 is detached to obtain the roll-type stamper for 2P.