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发明名称
Method for fabricating a mesa transistor-trench capacitor memory cell structure.
摘要
申请公布号
EP0463459(B1)
申请公布日期
1993.12.15
申请号
EP19910109555
申请日期
1991.06.11
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
DHONG, SANG H.;HWANG, WEI
分类号
H01L21/8242;H01L27/10;H01L27/108;H01L27/04;H01L21/822;(IPC1-7):H01L21/82
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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