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发明名称
METHOD AND DEVICE FOR GENERATING PLASMA
摘要
申请公布号
JPH06251897(A)
申请公布日期
1994.09.09
申请号
JP19930034985
申请日期
1993.02.24
申请人
SUMITOMO HEAVY IND LTD
发明人
SAKAMI TOSHIYUKI
分类号
H05H1/48;C23C14/32;H01L21/203;(IPC1-7):H05H1/48
主分类号
H05H1/48
代理机构
代理人
主权项
地址
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