| 摘要 |
PURPOSE: To manufacture an optical disk which enables a stamper with a stable and large recessed and projecting pattern to be manufactured and has uniform optical characteristics. CONSTITUTION: A developing device for manufacturing a stamper used for manufacturing a disk substrate is provided with a turntable 2 where a resist stamper 1 is placed, a first development liquid discharge nozzle 10 which is fixed near a rotary center, lasers 4a and 4b for applying laser beams L for monitor to points P1 and P2 at inner-periphery and outer-periphery sides, and detectors 8a, 9a, 8b, and 9b for detecting zero-order diffraction light L0 and a first-order diffraction light L1 of the transmission light. Then, a control part is also provided to detect the degree of progress of the resist stamper 1 according to the detection results and to adjust the amount of discharge of development liquid from the first and second development discharge nozzles 10 and 11 accordingly. |
