发明名称 PRODUCTION OF PATTERN OF IRON-CONTAINING ALLOY
摘要 PURPOSE: To provide a method for producing a pattern for an iron-contg. alloy by which the adhesion of a photosensitive resin compsn. to the iron-contg. alloy, especially 42Ni stainless steel and the etching and chemical resistances of the resin compsn. are improved. CONSTITUTION: When a photosensitive resin compsn. is laminated on a substrate with an iron-contg. alloy surface and it is exposed, developed and removed after etching to form a pattern of the iron-contg. alloy, and after the development a process for irradiating the developed resin compsn. with active light is carried out as an essential process before the etching.
申请公布号 JPH08328266(A) 申请公布日期 1996.12.13
申请号 JP19950132361 申请日期 1995.05.30
申请人 HITACHI CHEM CO LTD 发明人 KIMURA JINKO;KAWAGUCHI TAKU;MASAOKA KAZUTAKA
分类号 G03F7/004;G03F7/40;H01L21/027;H01L21/312;H01L23/50;(IPC1-7):G03F7/40 主分类号 G03F7/004
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