| 摘要 |
PURPOSE:To readily obtain a manganese oxide amorphous substance capable of producing small-sized cells having excellent charging and discharging characteristics, by converting specific manganese oxide to an amorphous state by a sputtering method. CONSTITUTION:Manganese oxide expressed by the formula (0<=x<0.5) is converted into an amorphous state by a sputtering method to afford the aimed amorphous substance. In case x is 0.5 in the formula, the manganese oxide attains Mn2O3 and charging and discharging characteristics are deteriorated to lower cycle characteristics. Furthermore, if x exceeds 0.5, charging and discharging and cycle characteristics show a tendency to successively deteriorate. Condition for carrying out sputtering is preferably as follows. <=50 deg.C substrate temperature, <=200W sputtering power, >=6X10<-2>Torr total gas pressure and >=30% oxygen partial pressure. |
