SYSTEM FOR EVALUATING ENVIRONMENT OF CLEANROOM

摘要

PURPOSE: An environment evaluating system of a clean room is provided to improve the efficiency of the environment evaluating system by connecting a signal transmitting section to a measuring device and connecting a signal receiving section to a host computer. CONSTITUTION: An environment evaluating system comprises a plurality of measuring devices(52) which are installed at predetermined positions in a clean room for measuring the environment condition of the clean room. A plurality of signal transmitting sections(54) are connected to the measuring devices(52) so as to transmit the measuring data in a wireless manner. A signal receiving section is installed in the clean room so as to receive the wireless signal from the signal transmitting sections(54). A host computer(60) is connected to the signal receiving section so as to analyze the measuring data.