| 摘要 |
<p>PROBLEM TO BE SOLVED: To make measurement correct and improve operativity by visually displaying on a monitor image by a movable mark a point to be measured next of a work to be measured or in which direction a detection tool therefor is positioned. SOLUTION: A stage is manually moved on x- and y-directions for displaying a site of a reference work corresponding to a first measurement point 21 which has been set in advance. An arrow-shaped detection tool is set on the monitor image by using a mouse indicating the site of the reference work corresponding to the first measurement point 21. At this time a coordinate value of a starting point of the detection tool is input, while a terminal point of the detection tool is input as a relative position, that is a distance in x- and y-directions instead of the coordinate value. Similarly the arrow-shaped detection tool is set on the monitor image using the mouse indicating sites on the reference work corresponding to second to twelfth measurement points 22 to 32. Thus positions of the detection tool corresponding to all measurement points 21 to 32 can be specified.</p> |
