OPTICAL SEMICONDUCTOR ELEMENT AND OPTICAL SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To reduce reflection at an interface where materials of different refractive indexes are joined while coping with the integration of an optical waveguide. SOLUTION: An optical waveguide region R61, a groove part A61, a semiconductor board B61 and an optical waveguide region R62 are sequentially formed at a semiconductor substrate 701 along the optical waveguide direction. The width of the groove part A61 and the thickness of the semiconductor board B61 are designed in such a manner that the light reflected at the interface between the optical waveguide region R61 and the groove part A61 is weakened by the light reflected at the interface between the groove part A61 and the semiconductor board B61 and by the light reflected at the interface between the semiconductor board B61 and the optical waveguide region R62. COPYRIGHT: (C)2009,JPO&INPIT