| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection device and method capable of acquiring electromagnetic wave response information of an inspection object as average information at high speed by using an electromagnetic wave. <P>SOLUTION: The inspection device using the electromagnetic wave 2 has an electromagnetic wave generation/irradiation means 9 for generating the electromagnetic wave and irradiates it onto the inspection object 11, and an electromagnetic wave detection means 10 having a plurality of detection parts. The plurality of detection parts are arranged so as to detect the electromagnetic wave irradiated from the electromagnetic wave generation/irradiation means and transmitted through or reflected by different sites of the inspection object 11 interactively, and are constructed so as to detect the electromagnetic wave from the different sites in each different detection time or detection frequency, respectively. The inspection device acquires electromagnetic wave response information on the inspection object 11 based on detection signals from the plurality of detection parts. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
