发明名称 Development Apparatus
摘要 <p>To recycle the developing solution in a short time such that the chance contacting with air is little. Dispose a flow- controlling ring 25 with gradual enlarged, skirt-like shape on the middle supporting sheet 23 of the inner side of the sidewall 7 of lid cylinder 3. The bottom end surface of flow-controlling ring 25 is opposed to the recycling bag 26 of the developing solution, the top view of recycling bag 26 of the developing solution is circular, its cross section looks like a water-conduction pipe, and its bottom surface tilts toward one direction, there is a pipe 27 connected to its lowest point, and the developing solution in the recycling bag 26 of the developing solution is recycled to the slot by the driving pump 28.</p>
申请公布号 KR100902724(B1) 申请公布日期 2009.06.15
申请号 KR20020070612 申请日期 2002.11.14
申请人 发明人
分类号 G03F7/30;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/30
代理机构 代理人
主权项
地址