发明名称 |
DEVICE FOR MEASURING THE DISTRIBUTION OR IMPULSE OF A SERIES OF DROPLETS |
摘要 |
A device for measuring distribution and/or impulse of serial droplets comprises a piezoelectric sensor positioned relative to a source of droplets by continuously being in contact with each of a plurality of droplets to generate an electrical signal. A logic circuit calculates one or more frequencies from the electrical signal. |
申请公布号 |
KR20160074405(A) |
申请公布日期 |
2016.06.28 |
申请号 |
KR20150176540 |
申请日期 |
2015.12.11 |
申请人 |
LAM RESEARCH AG |
发明人 |
DALMER MICHAEL;LIPPERT ALEXANDER;ENGESSER PHILIPP;OBWEGER RAINER |
分类号 |
H01L41/113;G01R23/02 |
主分类号 |
H01L41/113 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|