发明名称 DEVICE FOR MEASURING THE DISTRIBUTION OR IMPULSE OF A SERIES OF DROPLETS
摘要 A device for measuring distribution and/or impulse of serial droplets comprises a piezoelectric sensor positioned relative to a source of droplets by continuously being in contact with each of a plurality of droplets to generate an electrical signal. A logic circuit calculates one or more frequencies from the electrical signal.
申请公布号 KR20160074405(A) 申请公布日期 2016.06.28
申请号 KR20150176540 申请日期 2015.12.11
申请人 LAM RESEARCH AG 发明人 DALMER MICHAEL;LIPPERT ALEXANDER;ENGESSER PHILIPP;OBWEGER RAINER
分类号 H01L41/113;G01R23/02 主分类号 H01L41/113
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