| 摘要 |
PURPOSE: To provide an energy analyzer/monochrometer using the retarding which allows for selection of a desired energy electron beam, by inserting into an energy selection slit, while minimizing the impact of aberration due to retarding, between a deceleration lens and a filter, or between the filter and an acceleration lens.CONSTITUTION: A deceleration lens, a filter and an acceleration lens are provided, first focus of an electron beam is set in the deceleration lens, second and third focuses of the electron bean after passing the filter are set between the filter and acceleration lens and in the acceleration lens or after passage thereof. Impact of aberration is reduced between the deceleration lens and filter, and between the filter and acceleration lens thus improving energy resolution.SELECTED DRAWING: Figure 1 |
