Integrated metal grating

摘要

An integrated circuit includes a substrate, a metal grating disposed over the substrate, and a waveguide layer disposed over or under the metal grating. The metal grating is arranged to change a propagation direction of an optical signal and the waveguide layer is arranged to guide the optical signal to a desired direction.

主权项

1. An integrated circuit, comprising:
a metal grating disposed over a substrate; at least a first waveguide layer disposed over or under the metal grating; a metallization layer disposed over the substrate; and a photo detector disposed under the metallization layer; wherein:
the metal grating is arranged to change a propagation direction of an optical signal;the first waveguide layer is arranged to guide the optical signal towards the photo detector; andthe metallization layer comprises an extending portion that extends over at least a portion of the photo detector, the extending portion of the metallization layer adapted to convey an electrical signal generated by the photo detector.