METHOD FOR PRODUCING A PHOTOVOLTAIC SOLAR CELL HAVING AT LEAST ONE HETEROJUNCTION PASSIVATED BY MEANS OF HYDROGEN DIFFUSION

摘要

The invention relates to a method for producing a photovoltaic solar cell having at least one hetero-junction, including the following steps: A) providing a semiconductor substrate having base doping; B) producing a hetero-junction on at least one side of the semiconductor substrate, which hetero-junction has a doped hetero-junction layer and a dielectric tunnel layer arranged indirectly or directly between the hetero-junction layer and the semiconductor substrate; C) heating at least the hetero-junction layer in order to improve the electrical quality of the heterojunction. The invention is characterized in that, in a step D after step C, hydrogen is diffused into the hetero-junction layer and/or to the interface between the tunnel layer and the semiconductor substrate.

主权项

1. A method for production of a photovoltaic solar cell with at least one hetero-junction comprising the following steps:
A providing a semiconductor substrate with a base doping; B generating a hetero-junction at least on one side of the semiconductor substrate, said hetero-junction having a doped hetero-junction layer and a dielectric tunnel layer arranged directly between the hetero-junction layer and the semiconductor substrate; C heating at least the hetero-junction layer for improving an electric quality of the hetero-junction; and D after the processing step C, diffusing hydrogen into at least one of the hetero-junction layer or a boundary between the tunnel layer and the semiconductor substrate.