Substrate handler

摘要

A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.

主权项

1. A semiconductor substrate handling mechanism comprising:
an alignment plate having a first end and a second end, wherein the alignment plate is located adjacent to an opening in the substrate handling mechanism such that a substrate handler may address an aligned semiconductor substrate on the alignment plate; and a control mechanism moveable between the first end of the alignment plate and the second end of the alignment plate, the control mechanism being addressed to the semiconductor substrate when positioned at the first end of the alignment plate.