| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate gripping device capable of precisely adjusting the unevenesss or flatness of the substrate holding surface of a gripping plate for gripping a substrate. SOLUTION: A substrate gripping device is provided with a gripping plate 18 for gripping a substrate in a front face, and a plate 20 to be covered attached to form a spacing S with the gripping plate 18 in the backside of the gripping plate 18. The plates 20 to be covered are connected to each other by a plurality of bolt arrays 44 and 46 disposed in a peripheral direction at a specified interval, and the bolt arrays 44 and 46 are disposed in two rows at least in a coaxial relation. |
