| 摘要 |
PURPOSE:To produce a light emitting device of double hetero structure for optical fiber communications which are of higher productivity and simple construction by a method wherein an electric current passage is formed at protrusions of a thin clad layer correspondingly to burying holes on a GaAs substrate and a light outtake-window on a thick clad layer is formed correspondingly to protrusions. CONSTITUTION:Burying holes 2 of a specified size are provided crosswise at specified intervals by etching using photoresist before liquid growth on the face of a GaAs substrate 1. Next, this is set on a carbon boat for liquid growth to cause a P type clad layer as the first layer 3 to be grown at the time when temperature becomes lower than a specified temperature. At the time the temperature lowers further, a P type active layer as the second layer 4 and an N type clad layer as the third layer 5 are grown to form double hetero structure. |
