| 摘要 |
PROBLEM TO BE SOLVED: To correct warps in workpieces during a lapping operation by a lapping method and device intended to correct warps in lapped workpieces. SOLUTION: During machining, the warp level of a workpiece 103 is detected and the warps are corrected. Warps during machining can be corrected, and laborious measurement of the warp level of the workpiece 103 can be eliminated before machining. A warp correcting mechanism 116 uses a pneumatic mechanism for applying pressure to the workpiece 103 in dependence on air supply pressure. A fine correction of warps can be realized, or warps can be eliminated. The pneumatic mechanism applies no excessive pressure to lapping jigs. |
