Method and apparatus for rapid measurements of electrical signals at circuit nodes of integrated circuits in which noise signals are also detected

摘要

A method for measuring electrical signals according to a sampling principle with the assistance of an electron probe, whereby the signal is respectively repeatedly sampled in succession at different phase points, enables a fast registration of an electrical signal at a circuit node of an integrated circuit and simultaneously permits registration when at least one noise signal appears between two clock edges of a basic pulse rate of the integrated circuit. Between two successive phase points at which the signal is repeatedly sampled in succession for potential measurement, only a check is executed at phase points by sampling as to whether a noise signal exists in this intermediate region.