| 摘要 |
<p>PURPOSE:To obtain a high-reliability humidity sensor which can measure humidity in a wide range with high accuracy and is not deteriorated in a severe environment by using a silica film in which alumina particles are dispersed a a humidity sensitive film. CONSTITUTION:An alumina substrate 1 is subjected to the dip-coating with a silica sol in which alumina particles are dispersed, followed by drying at 100 deg.C for 10 minutes and sintering at 450 deg.C for 30 minutes, resulting in a silica film 3 in which alumina particles are dispersed. Accordingly, the linearity of the variation of the resistance accordingly to the variation of relatively humidity is good and this sensor shows a resistance which is easy to be measured even if humidity value is low which causes a high resistance. Also, the film-thickness, pore diameters, state of cracks, etc., can be controlled. Thus, a high-accuracy and high-reliability humidity sensor which is not deteriorated in a several environment can be obtained.</p> |
