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发明名称
INSPECTING METHOD OF STATE OF CONTAMINATION OF SURFACE OF ELECTRONIC COMPONENT AFTER WASHING
摘要
申请公布号
JPH0460457(A)
申请公布日期
1992.02.26
申请号
JP19900170041
申请日期
1990.06.29
申请人
HITACHI LTD
发明人
EZAWA MASAYOSHI;MISUMI AKIRA;KAWANAKAKO HIROSHI;KAWAGOE HIROMI;NAKAOKA YASUNAGA
分类号
G01N31/00
主分类号
G01N31/00
代理机构
代理人
主权项
地址
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