发明名称 Process for forming a structure with integrated optical waveguide and mirror, and structure obtained
摘要 The invention relates to a process for producing a structure with integrated optical waveguide and mirror, comprising the stages consisting in: etching a substrate to form an inclined plane on the substrate, depositing by epitaxy, on the face of the substrate carrying the inclined plane, various layers of materials capable of forming an optical waveguide, clearing away the substrate, via its face opposite the epitaxed layers, up to the inclined plane, to form a mirror capable of reflecting light from the optical waveguide in a given direction.
申请公布号 US5373570(A) 申请公布日期 1994.12.13
申请号 US19930093814 申请日期 1993.07.19
申请人 FRANCE TELECOM 发明人 MENIGAUX, LOUIS;CARENCO, ALAIN
分类号 H01L27/14;G02B6/12;G02B6/13;H01L31/0232;H01P3/16;(IPC1-7):G02B6/12 主分类号 H01L27/14
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