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发明名称
RESIST COATER
摘要
申请公布号
JPH07130627(A)
申请公布日期
1995.05.19
申请号
JP19930276359
申请日期
1993.11.05
申请人
KOGANEI CORP
发明人
YAJIMA TAKEO
分类号
G03F7/16;B05C5/00;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
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