发明名称 Positive photoresist composition comprising a novolak resin having a cycloalkylidene-bisphenol group
摘要 A positive photoresist composition comprising an alkali-soluble novolak resin and a 1,2-quinonediazide compound is described, wherein the alkali-soluble novolak resin contains a novolak resin to be obtained by condensing a mixture of (a) at least one phenol represented by the following formula (1) and at least one compound represented by the following formula (2) and (b) at least one aldehyde: <IMAGE> (1) <IMAGE> (2) wherein R1, R2 and R3 are the same or different and each represents a hydrogen atom, a hydroxyl group, a halogen atom, an alkyl group, an alkoxy group, an alkenyl group, an aryl group, an aralkyl group, an alkoxycarbonyl group or an arylcarbonyl group; R4, R5, R6 and R7 are the same or different and each represents a hydrogen atom, a hydroxyl group, a halogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, an alkenyl group, an aryl group or an aralkyl group; and n represents an integer of from 4 to 7.
申请公布号 US5494773(A) 申请公布日期 1996.02.27
申请号 US19950399046 申请日期 1995.03.06
申请人 FUJI PHOTO FILM CO., LTD. 发明人 TAN, SHIRO;KAWABE, YASUMASA;KOKUBO, TADAYOSHI
分类号 G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/023 主分类号 G03F7/022
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