| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder of a microwork capable of precisely positioning even a work of a microsize and accurately regulating its contact pressure. SOLUTION: In this holder, a mirror cylinder 2 with a built-in objective lens 1 for observing a work C is fixed and a movable cylinder 4 is freely inserted into the outside of the mirror cylinder 2, and also the movable cylinder 4 is vertically and rotatably supported by a static pressure bearing 6, and there is provided an attractive nozzle 22 holding the work C at a position of an optical shaft S of the objective lens 1 at a lower end part of the movable cylinder 4, and there is also provided a weight balance mechanism 14 balance- regulating a weight of the movable cylinder 4. |
