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发明名称
ELLIPSOMETER MIT HOHER RÄUMLICHER AUFLÖSUNG
摘要
申请公布号
AT221653(T)
申请公布日期
2002.08.15
申请号
AT19960924927T
申请日期
1996.07.03
申请人
SOCIETE DE PRODUCTION ET DE RECHERCHES APPLIQUEES
发明人
PIEL, JEAN-PHILIPPE;STEHLE, JEAN-LOUIS;ZAHORSKI, DORIAN
分类号
G01N21/21;(IPC1-7):G01N21/21
主分类号
G01N21/21
代理机构
代理人
主权项
地址
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