| 摘要 |
PROBLEM TO BE SOLVED: To accurately form a shape, by which a luminous flux diameter of a light beam can be accurately regulated and which is suitable for incidence and emission, when the substrate where an aperture is formed in made thick or the light beam is inclined and made incident from a direction orthogonal to the surface of the substrate. SOLUTION: An opening 11 is formed by using a means such as etching in opening holes on silicon substrates 15c and 16 used as apertures. By performing work from the front and back surfaces of the substrate, so that front and back patterns is the same or different, the openings 11 and so on are formed in an arbitrary shape, whereby light is prevented from being eclipsed at a light passing allowable part 17.
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