| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning beam measuring device and a method capable of executing real-time measurement of the beam position, executing positioning control so as to correct the influence of a scanning line curve or the like, and acquiring beam information accurately and surely. SOLUTION: This device is equipped with a synchronous detection means 5 of the scanning beam, a magnifying optical system 4 for magnifying the scanning beam, a first photodetection means 6 having a two-dimensional light receiving region, an image operation means 13 for calculating the number of beams, the beam size, the quantity of light, the beam irradiation position on the light receiving surface, the distance between the beams or the like based on light beam information detected by the first photodetection means, a moving means 20 for moving the first photodetection means 6 in the sub-scanning direction of the scanning beam, a positioning control means for executing positioning control of the moving means in the scanning surface, a beam splitting means 8 for splitting the scanning beam in two, and a second photodetection means 7 capable of detecting one of the split scanning beams. The positioning control means 13 executes positioning control of the first photodetection means 6 in the sub-scanning direction based on beam position information detected by the second photodetection means 7.
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